JPS63134449U - - Google Patents
Info
- Publication number
- JPS63134449U JPS63134449U JP2687587U JP2687587U JPS63134449U JP S63134449 U JPS63134449 U JP S63134449U JP 2687587 U JP2687587 U JP 2687587U JP 2687587 U JP2687587 U JP 2687587U JP S63134449 U JPS63134449 U JP S63134449U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- plasma
- torch
- axis
- plasma torch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009616 inductively coupled plasma Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2687587U JPH0521249Y2 (en]) | 1987-02-25 | 1987-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2687587U JPH0521249Y2 (en]) | 1987-02-25 | 1987-02-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63134449U true JPS63134449U (en]) | 1988-09-02 |
| JPH0521249Y2 JPH0521249Y2 (en]) | 1993-05-31 |
Family
ID=30828374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2687587U Expired - Lifetime JPH0521249Y2 (en]) | 1987-02-25 | 1987-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521249Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012009290A (ja) * | 2010-06-25 | 2012-01-12 | Hitachi High-Technologies Corp | 質量分析装置 |
-
1987
- 1987-02-25 JP JP2687587U patent/JPH0521249Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012009290A (ja) * | 2010-06-25 | 2012-01-12 | Hitachi High-Technologies Corp | 質量分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521249Y2 (en]) | 1993-05-31 |